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Chapter title |
Anisotropy and Surface Roughness of Silicon Etched by TMAH in Presence of Potassium Persulfate: A Comparison with Ammonium Persulfate
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Chapter number | 119 |
Book title |
Physics of Semiconductor Devices
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Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-03002-9_119 |
Book ISBNs |
978-3-31-903001-2, 978-3-31-903002-9
|
Authors |
Madhuri Suresh, Radha Bhaskar, P. Savitha, K. N. Bhat, Suresh, Madhuri, Bhaskar, Radha, Savitha, P., Bhat, K. N. |