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Process Variations in Microsystems Manufacturing

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Cover of 'Process Variations in Microsystems Manufacturing'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 An Overview of MEMS Microsystems
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    Chapter 3 Microsystems Manufacturing Methods: Integrated Circuit Processing Steps
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    Chapter 4 Microsystems Manufacturing Methods: MEMS Processes
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    Chapter 5 Metrology for Microsystems Manufacturing
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    Chapter 6 Microsystems Material Properties
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    Chapter 7 Microsystems Process Integration, Testing, and Packaging
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    Chapter 8 Device Parameter Variations in Microsystems Manufacturing
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    Chapter 9 Yield Analysis and Quality Assurance and Control Methods Used in Microsystems Manufacturing
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    Chapter 10 Managing Parameter Variations in Microsystems Device Design
Attention for Chapter 1: Introduction
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