Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si
Article in Sensors and Actuators A Physical (July 2024)
The most recent citing publications are shown below. View all 258 publications that cite this research output on Dimensions.
Article in Sensors and Actuators A Physical (July 2024)
Article in Materials Science in Semiconductor Processing (June 2024)
Article in Ceramics International (April 2024)