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Mendeley readers
| Chapter title |
Production of silicon wafers and environmental problems
|
|---|---|
| Chapter number | 7 |
| Book title |
Introduction to VLSI Process Engineering
|
| Published by |
Springer Netherlands, January 1993
|
| DOI | 10.1007/978-94-011-1562-9_7 |
| Book ISBNs |
978-9-40-104682-4, 978-9-40-111562-9
|
| Authors |
The Society of Chemical Engineers of Japan |
| Editors |
The Society of Chemical Engineers of Japan |
Mendeley readers
The data shown below were compiled from readership statistics for 5 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 5 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Bachelor | 2 | 40% |
| Student > Ph. D. Student | 1 | 20% |
| Unknown | 2 | 40% |
| Readers by discipline | Count | As % |
|---|---|---|
| Chemical Engineering | 2 | 40% |
| Unknown | 3 | 60% |