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The Physics and Fabrication of Microstructures and Microdevices

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Table of Contents

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    Book Overview
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    Chapter 1 High Resolution Lithography (Some Comments on Limits and Future Possibilities)
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    Chapter 2 Submicron Lithography Tools
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    Chapter 3 Electron Beam Nanolithography
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    Chapter 4 The Spin Coating Process Mechanism
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    Chapter 5 Resists Patterning
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    Chapter 6 Dry Etching: Concepts, Methods and Applications
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    Chapter 7 Overlayers
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    Chapter 8 Self-Aligned Growth of Microstructures
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    Chapter 9 Laser-Induced Growth of Microstructures
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    Chapter 10 Structural Characterization of Superlattices by X-Ray Diffraction
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    Chapter 11 Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces
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    Chapter 12 Fabrication of Small Structures of Semiconductors and Metals
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    Chapter 13 Atomically Controlled Growth in 2, 1 and OD, and Applications
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    Chapter 14 Microstructure of Organic Mono- and Multilayers
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    Chapter 15 Fundamentals of Low Dimensional Physics
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    Chapter 16 Electron States in Semiconductor Microstructures
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    Chapter 17 Quantum Transport Theory for Small-Geometry Structures
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    Chapter 18 Noise in Microstructures
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    Chapter 19 Transport Physics of Multicontact Si MOS Nanostructures
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    Chapter 20 1D Structures — Field Confinement Approach
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    Chapter 21 Excitons in GaAs Quantum Wells: Interface Disorder and Mobility
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    Chapter 22 Nonlinear Optics and Electro-Optics of Quantum Wells
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    Chapter 23 Quantum Interference Effects in Small Systems: Normal and Superconducting Networks
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    Chapter 24 2D Localisation and Interaction Effects in Semiconductor Structures
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    Chapter 25 Optical Nonlinearities in Small Particles and Composite Materials
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    Chapter 26 Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers in the Presence of an Applied Magnetic Field
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    Chapter 27 Scaling Limits of Silicon VLSI Technology
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    Chapter 28 Three Part Series on Heterojunction Transistors
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    Chapter 29 CAD: Overview and Perspectives
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    Chapter 30 Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics
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    Chapter 31 The Metal Base Transistors
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    Chapter 32 An Integrated Microfabrication System for Low-Dimensionality Structures and Devices
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    Chapter 33 Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes
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    Chapter 34 Electronic Neural Computing
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    Chapter 35 Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure
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    Chapter 36 Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography
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    Chapter 37 2D Josephson Junction Networks
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    Chapter 38 Electric Field Heating of Supported and Free-Standing AuPd Fine Wires
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    Chapter 39 High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers
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    Chapter 40 Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode
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    Chapter 41 Disorder and Two-Dimensional Electronic Sub-Bands
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    Chapter 42 A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures
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    Chapter 43 A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning Tunneling Microscope Problem
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    Chapter 44 A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire
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    Chapter 45 The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors
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Title
The Physics and Fabrication of Microstructures and Microdevices
Published by
Springer Berlin Heidelberg, December 2012
DOI 10.1007/978-3-642-71446-7
ISBNs
978-3-64-271448-1, 978-3-64-271446-7
Editors

Kelly, Michael J., Weisbuch, Claude

Mendeley readers

The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 2 100%

Demographic breakdown

Readers by professional status Count As %
Professor 1 50%
Student > Master 1 50%
Readers by discipline Count As %
Materials Science 2 100%