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Chapter title |
Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics
|
---|---|
Chapter number | 30 |
Book title |
The Physics and Fabrication of Microstructures and Microdevices
|
Published by |
Springer, Berlin, Heidelberg, January 1986
|
DOI | 10.1007/978-3-642-71446-7_30 |
Book ISBNs |
978-3-64-271448-1, 978-3-64-271446-7
|
Authors |
H. Ahmed |