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| Chapter title |
Metrology and Inspection
|
|---|---|
| Chapter number | 6 |
| Book title |
Three-Dimensional Integration of Semiconductors
|
| Published by |
Springer, Cham, January 2015
|
| DOI | 10.1007/978-3-319-18675-7_6 |
| Book ISBNs |
978-3-31-918674-0, 978-3-31-918675-7
|
| Authors |
Gilles Fresquet, Jean-Philippe Piel, Sylvain Perrot, Hideo Takizawa, Osamu Sato, Allen Gu, Michael Feser, Bruce Johnson, Raleigh Estrada, Yoshitaka Tatsumoto |