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Towards Synthesis of Micro-/Nano-systems

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Cover of 'Towards Synthesis of Micro-/Nano-systems'

Table of Contents

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    Book Overview
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    Chapter 1 Merging Technologies for Optics
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    Chapter 2 Fast Tool Servos: Advances in Precision, Acceleration, and Bandwidth
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    Chapter 3 Microsystem Technologies for Automotive Applications
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    Chapter 4 System Concept and Innovative Component Design for Ultra-Precision Assembly Processes
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    Chapter 5 Development of a Design Tool for Machine Tools Combining Conceptual Design Support and Detail Design Method
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    Chapter 6 Precision Contouring Control of Multi-Axis Feed Drive Systems
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    Chapter 7 Areal Gear Flank Description as a Requirement for Optical Gear Metrology
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    Chapter 8 Detecting Perturbation Occurrence during Walking
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    Chapter 9 Supporting the Reuse of Parts Based on Operation Histories of Products and Preference of Consumers
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    Chapter 10 Multi-objective Reactive Scheduling Based on Genetic Algorithm
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    Chapter 11 Ultraprecision Wide-angle Profile Measurement with Air-bearing Cylinder Slant Probes
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    Chapter 12 Development of a Laser-Guided Deep-Hole Measuring System: Autocollimation System
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    Chapter 13 Development of an Optical Measuring Device for Rotation Accuracy of Micro-Spindle —Application to Measurements of a High-Speed Spindle—
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    Chapter 14 Laser Interferometric Measurement of Involute Profile by Rolling of Artifact
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    Chapter 15 Study on Manufacturing Method to Reduce Cogging Torque of Motor with Separate Core
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    Chapter 16 A High Power and Precision Ultrasonic Linear Motor with Lateral Flexible Supports
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    Chapter 17 A Precise Motion Measurement of a Miniature Robot Driven by the Deformation of Piezoelectric Actuators
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    Chapter 18 Development of IVUS (Intravascular Ultrasound) Driven by Ultrasonic Micromotor —Principle of Drive and Detection Methods—
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    Chapter 19 Development of Membrane Driven Micropump —Principle of Microbubble Driving Mechanism and Prototype—
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    Chapter 20 A 3-DOF Rotational Precision Positioning Stage using Spring-mounted PZT Actuators
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    Chapter 21 Active Damping of a Wafer Loading Robot using Piezoceramic Actuators
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    Chapter 22 Visual Feedback Control of a Micro Lathe
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    Chapter 23 An 8-Axis Robot Based Rough Cutting System for Surface Sculpturing
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    Chapter 24 A New Position Surveying System for the Underground Pipes Using Two Rotary Encoders
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    Chapter 25 Measurement of Cutting Torque by Speed Increasing Spindle
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    Chapter 26 Diamond Turning using Water Drive Spindle
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    Chapter 27 Development and Evaluation of a High-Precision Machining Center with Friction-Less Drives
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    Chapter 28 Machining Feature-Driven 5-Axis CNC Machine Tools
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    Chapter 29 Selective Anodising Technologies for Obtaining Translucent Micro Structures
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    Chapter 30 Development of Rectangular Microblasting Nozzle
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    Chapter 31 Thick SU-8 Mask for Micro Channeling of Glass by using Micro Abrasive Jet Machining
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    Chapter 32 Fabrication of Self-assembled Microstructure using Controlled Liquid Spreading on Textured Surface
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    Chapter 33 Improving Performance of Direct Photosynthetic/Metabolic Micro Bio Fuel Cell (DPBFC) by Gene Manipulation of Bacteria
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    Chapter 34 Nanometer Deflection Control of AFM Probe by Irradiating Polarized Laser and its Application to Nano-Structuring Process
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    Chapter 35 Investigation on Fabricating 3D Structures Using Inkjet Printing Technology
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    Chapter 36 Miniaturization of Dot Pattern by Metal Forming for Direct Marking of 2D Barcode Symbols
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    Chapter 37 Plasma Etching Based Processes for the Fabrication of Micro Structured Linear Guide
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    Chapter 38 Ultraprecision Finishing of Photomask Substrate by Utilizing Atmospheric Pressure Plasma
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    Chapter 39 Development of Ultra Precision Finishing Method for Quartz Crystal Wafer Utilizing Atmospheric Pressure Plasma
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    Chapter 40 Sub-nanometer Smoothing of Diamond-turned Metal Surfaces using Ion Beams
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    Chapter 41 Laser Machining of Cobalt Cemented Tungsten Carbides
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    Chapter 42 Study of Thermal Deformation of a Base Sheet Caused by Laser Cutting
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    Chapter 43 Laser Welding of Transparent Resin Plates
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    Chapter 44 Fabrication of Carbon Nanotube Reinforced Hydroxyapatite Coating on Stainless Steel 316L by Laser Surface Treatment
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    Chapter 45 Novel Abrasive-free Planarization of Si and SiC using Catalyst
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    Chapter 46 Polishing of Single Crystal SiC with the LHA Pad
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    Chapter 47 A Computational Study on Slurry Flow between a Wafer and CMP Pad with Grooves
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    Chapter 48 Multilevel Computer Generated Hologram on a Curved Surface for High Power CO 2 Laser Beam Shaping
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    Chapter 49 Milling-Combined Laser Metal Sintering System and Production of Injection Molds with Sophisticated Functions
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    Chapter 50 Development of Optical Elements with ELID-grinding and MRF Synergistic Finishing Process
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    Chapter 51 Fabrication of Ultraprecisely Figured Mirror for Nano Focusing Hard-x-ray
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    Chapter 52 Surfaces Formation of Precision ELID Grinding Rock Minerals
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    Chapter 53 Dressing of Coarse-Grained Diamond Wheels for Ductile Machining of Brittle Materials
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    Chapter 54 Study on Subsurface Damage Generated in Ground Si Wafer
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    Chapter 55 Fabrication of High-quality Surfaces on Precise Lens Mold Materials by a new ELID Grinding Wheel
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    Chapter 56 A GA-based Optimization of Compliant Micro-manipulator
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    Chapter 57 Path Control Scheme for Vision Guided Micro Manipulation System
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    Chapter 58 Machined Surface Analysis for 5-axis Machine Tools
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    Chapter 59 A New Approach Manufacturing Cell Scheduling based on Skill-based Manufacturing Integrated to Genetic Algorithm
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    Chapter 60 Slide-bending Formation of Thin Metal Sheet by Using an Industrial Robot
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    Chapter 61 High Accuracy and High Capacity Motor Cooling System Using Phase Change of Refrigerant for Semiconductor Lithography Apparatus
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    Chapter 62 Development of the Earthworm Robot using a Shape Memory Alloy
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    Chapter 63 Improvement of Propulsion Mechanism based on the Inertial Force
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    Chapter 64 A High-order Spline Filter for Surface Roughness Measurement
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    Chapter 65 Surface structure of monocrystalline silicon anisotropically etched with the help of microwaves
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    Chapter 66 Development of an Ultra-Thin 100 μm Diametrical Coaxial Cable using a Coating Technique
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    Chapter 67 Study on Si Wafer Cooling by Low Pressure Argon Gas in Vacuum Eenvironment
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    Chapter 68 Research on Development of Advanced Analyzer Components with Ultraprecision
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    Chapter 69 Effects of Wear of Single Crystal Diamond Tool with Large Nose Radius on Work Hardening and Residual Stress
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    Chapter 70 Experimental Analysis and Optimization of Cutting Parameters for End Milling Aluminium Alloy
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    Chapter 71 Study on the ELID Grinding Forces of Ceramics and Steels
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    Chapter 72 Grinding of C/C-SiC Composite in Dry Method
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    Chapter 73 Micromachining Characteristics of Sapphire Surface with Fifth Harmonic Nd: YAG Lasers
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    Chapter 74 Development of an Automatic Scraping Machine with Recognition for Bearing of Scraped Surfaces — Construction of Automatic Scraping Machine —
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Title
Towards Synthesis of Micro-/Nano-systems
Published by
Springer London, October 2006
DOI 10.1007/1-84628-559-3
ISBNs
978-1-84628-558-5, 978-1-84628-559-2
Authors

Kimura, Fumihiko, Horio, Kenichiro

Mendeley readers

The data shown below were compiled from readership statistics for 10 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
United States 1 10%
Unknown 9 90%

Demographic breakdown

Readers by professional status Count As %
Student > Master 5 50%
Student > Ph. D. Student 2 20%
Other 1 10%
Researcher 1 10%
Student > Postgraduate 1 10%
Other 0 0%
Readers by discipline Count As %
Engineering 8 80%
Chemistry 1 10%
Design 1 10%