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Chapter title |
Micromachined inclinometer with high sensitivity and very good stability
|
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Chapter number | 345 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_345 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Lang, Billat, S., Glosch, H., Kunze, M., Hedrich, F., Frech, J., Auber, J., Sandmaier, H., Lang, W. |