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Chapter title |
Stainless Steel-Based Integrated Mass-Flow Controller for Reactive and Corrosive Gases
|
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Chapter number | 221 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_221 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Kaoru Hirata, Dong Youn Sim, Masayoshi Esashi, Hirata, Kaoru, Sim, Dong Youn, Esashi, Masayoshi |