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Chapter title |
Advanced Sacrificial Poly-Si Technology for Fluidic Systems
|
---|---|
Chapter number | 148 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_148 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
J. W. Berenschot, N. R. Tas, T. S. J. Lammerink, M. Elwenspoek, A. van den Berg, Berenschot, J. W., Tas, N. R., Lammerink, T. S. J., Elwenspoek, M., van den Berg, A. |