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Chapter title |
Extension of Surface/Bulk Micromachining: One-Mask Fabrication Technology Enabling the Integration of 6-DoF Inertial Sensors on a Single Wafer
|
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Chapter number | 262 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_262 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Sangwoo Lee, Byeung-Leul Lee, Kyu Dong Jung, Joon Hyock Choi, Taek-Ryong Chung, Yong Chul Cho, Lee, Sangwoo, Lee, Byeung-Leul, Jung, Kyu Dong, Choi, Joon Hyock, Chung, Taek-Ryong, Cho, Yong Chul |