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Chapter title |
Fabrication of Ultrathick Micromolds Using JSR THB-430N Negative UV Photoresist
|
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Chapter number | 376 |
Book title |
Transducers ’01 Eurosensors XV
|
Published by |
Springer, Berlin, Heidelberg, January 2001
|
DOI | 10.1007/978-3-642-59497-7_376 |
Book ISBNs |
978-3-54-042150-4, 978-3-64-259497-7
|
Authors |
Fan-Gang Tseng, Chih-Sheng Yu, Tseng, Fan-Gang, Yu, Chih-Sheng |