MEMS Materials and Processes Handbook
Overview of attention for book
Table of Contents
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Altmetric BadgeBook Overview
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Altmetric BadgeChapter 1 The MEMS Design Process
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Altmetric BadgeChapter 2 Additive Processes for Semiconductors and Dielectric Materials
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Altmetric BadgeChapter 3 Additive Processes for Metals
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Altmetric BadgeChapter 4 Additive Processes for Polymeric Materials
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Altmetric BadgeChapter 5 Additive Processes for Piezoelectric Materials: Piezoelectric MEMS
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Altmetric BadgeChapter 6 Materials and Processes in Shape Memory Alloy
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Altmetric BadgeChapter 7 Dry Etching for Micromachining Applications
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Altmetric BadgeChapter 8 MEMS Wet-Etch Processes and Procedures
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Altmetric BadgeChapter 9 MEMS Lithography and Micromachining Techniques
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Altmetric BadgeChapter 10 Doping Processes for MEMS
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Altmetric BadgeChapter 11 Wafer Bonding
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Altmetric BadgeChapter 12 MEMS Packaging Materials
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Altmetric BadgeChapter 13 Surface Treatment and Planarization
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Altmetric BadgeChapter 14 MEMS Process Integration