Modeling and optimization of lens heating effect for lithographic projector
Article in Journal of Micro/Nanopatterning Materials and Metrology (April 2018)
The most recent citing publications are shown below. View all 3 publications that cite this research output on Dimensions.
Article in Journal of Micro/Nanopatterning Materials and Metrology (April 2018)
Article in ECS Journal of Solid State Science and Technology (August 2017)
Article in The International Journal of Advanced Manufacturing Technology (January 2011)