You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
| Chapter title |
Prebake (Softbake)
|
|---|---|
| Chapter number | 7 |
| Book title |
Semiconductor Lithography
|
| Published by |
Springer, Boston, MA, January 1988
|
| DOI | 10.1007/978-1-4613-0885-0_7 |
| Book ISBNs |
978-1-4612-8228-0, 978-1-4613-0885-0
|
| Authors |
Wayne M. Moreau, Moreau, Wayne M. |
Mendeley readers
The data shown below were compiled from readership statistics for 10 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 10 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 4 | 40% |
| Student > Master | 2 | 20% |
| Student > Bachelor | 1 | 10% |
| Unknown | 3 | 30% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 3 | 30% |
| Physics and Astronomy | 2 | 20% |
| Chemistry | 1 | 10% |
| Materials Science | 1 | 10% |
| Unknown | 3 | 30% |