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Semiconductor Lithography : Principles, Practices, and Materials

Overview of attention for book
Attention for Chapter 2: Positive Photoresists
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Citations

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14 Mendeley
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Chapter title
Positive Photoresists
Chapter number 2
Book title
Semiconductor Lithography
Published by
Springer, Boston, MA, January 1988
DOI 10.1007/978-1-4613-0885-0_2
Book ISBNs
978-1-4612-8228-0, 978-1-4613-0885-0
Authors

Wayne M. Moreau, Moreau, Wayne M.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 14 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 14 100%

Demographic breakdown

Readers by professional status Count As %
Researcher 4 29%
Student > Ph. D. Student 4 29%
Other 1 7%
Student > Bachelor 1 7%
Lecturer 1 7%
Other 2 14%
Unknown 1 7%
Readers by discipline Count As %
Physics and Astronomy 5 36%
Engineering 5 36%
Biochemistry, Genetics and Molecular Biology 2 14%
Materials Science 1 7%
Unknown 1 7%