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Mendeley readers
| Chapter title |
Negative Radiation Resists
|
|---|---|
| Chapter number | 5 |
| Book title |
Semiconductor Lithography
|
| Published by |
Springer, Boston, MA, January 1988
|
| DOI | 10.1007/978-1-4613-0885-0_5 |
| Book ISBNs |
978-1-4612-8228-0, 978-1-4613-0885-0
|
| Authors |
Wayne M. Moreau, Moreau, Wayne M. |
Mendeley readers
The data shown below were compiled from readership statistics for 1 Mendeley reader of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Unknown | 1 | 100% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 1 | 100% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 1 | 100% |