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Semiconductor Lithography : Principles, Practices, and Materials

Overview of attention for book
Attention for Chapter 6: Surface Preparation and Coating
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Citations

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58 Mendeley
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Chapter title
Surface Preparation and Coating
Chapter number 6
Book title
Semiconductor Lithography
Published by
Springer, Boston, MA, January 1988
DOI 10.1007/978-1-4613-0885-0_6
Book ISBNs
978-1-4612-8228-0, 978-1-4613-0885-0
Authors

Wayne M. Moreau, Moreau, Wayne M.

Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 58 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 58 100%

Demographic breakdown

Readers by professional status Count As %
Student > Ph. D. Student 1 2%
Researcher 1 2%
Unknown 56 97%
Readers by discipline Count As %
Engineering 2 3%
Unknown 56 97%