Semiconductor Lithography : Principles, Practices, and Materials

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syllabi: 2 institutions with syllabi

patent: 1 patent

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dimensions_citation: 436 Dimensions

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So far, Dimensions has found 436 publications that cite this research output.

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Adhesion of Electron-Irradiated Diazoquinone–Novolac Photoresist Films to Single-Crystal Silicon

Article in High Energy Chemistry (February 2024)

Fourier-IR Spectroscopy of Photoresist/Silicon Structures for Explosive Lithography

Article in Journal of Applied Spectroscopy (January 2024)

Fabrication of micro-nano patterned materials mimicking the topological structure of extracellular matrix for biomedical applications

Article in Nano Research (December 2023)

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