↓ Skip to main content
Altmetric
What is this page?
Embed badge
Share
Share on Twitter
Share on Facebook
Share by email
Semiconductor Lithography : Principles, Practices, and Materials
Overview of attention for book
Table of Contents
Altmetric Badge
Book Overview
Altmetric Badge
Chapter 1
Introduction
Altmetric Badge
Chapter 2
Positive Photoresists
Altmetric Badge
Chapter 3
Positive Radiation Resists
Altmetric Badge
Chapter 4
Negative Photoresists
Altmetric Badge
Chapter 5
Negative Radiation Resists
Altmetric Badge
Chapter 6
Surface Preparation and Coating
Altmetric Badge
Chapter 7
Prebake (Softbake)
Altmetric Badge
Chapter 8
Optical Exposure
Altmetric Badge
Chapter 9
Radiation Exposure
Altmetric Badge
Chapter 10
Developing Resist Images
Altmetric Badge
Chapter 11
Postbake
Altmetric Badge
Chapter 12
Additive Processes
Altmetric Badge
Chapter 13
Subtractive Etching
Altmetric Badge
Chapter 14
Stripping of Resists
Altmetric Badge
Chapter 15
Process Controls
Altmetric Badge
Chapter 16
Nonresist Processes
Altmetric Badge
Chapter 17
Summary and Future Processes
Overall attention for this book and its chapters
Altmetric Badge
Mentioned by
syllabi
2
institutions with syllabi
patent
1
patent
Citations
dimensions_citation
436
Dimensions
Readers on
mendeley
69
Mendeley
Book overview
1. Introduction
2. Positive Photoresists
3. Positive Radiation Resists
4. Negative Photoresists
5. Negative Radiation Resists
6. Surface Preparation and Coating
7. Prebake (Softbake)
8. Optical Exposure
9. Radiation Exposure
10. Developing Resist Images
11. Postbake
12. Additive Processes
13. Subtractive Etching
14. Stripping of Resists
15. Process Controls
16. Nonresist Processes
17. Summary and Future Processes
Summary
Syllabi
Patents
Dimensions citations
This data is correct as of December 2015 - for more up to date information, please visit
https://opensyllabus.org/
So far, Altmetric has seen this research output assigned in
2
syllabi from
2
institutions on Open Syllabus Project.
Institution
Syllabi count
Course subject areas covered
Visvesvaraya Technological University
1
Engineering
University of Florida
1
Unknown